Semiconductor device with integrated capacitor and manufacturing method thereof

ABSTRACT

A semiconductor structure includes a capacitor including a first electrode and a second electrode disposed over and electrically insulated from the first electrode. The semiconductor structure also includes a first conductive via extending through the first electrode and contacting a planar surface of the first electrode. The semiconductor structure further includes a second conductive via extending through the second electrode and contacting a planar surface of the second electrode.

PRIORITY CLAIM AND CROSS-REFERENCE

This application claims priority to U.S. patent application Ser. No.62/566,000 filed 29 Sep. 2017, the disclosure of which is herebyincorporated by reference in its entirety.

BACKGROUND

In modern semiconductor devices and systems, integration andminiaturization of components have progressed at an increasingly rapidpace, in wireless applications, one of the growing challengesencountered by the integration process is the disposition of capacitors.Conventional capacitors associated with integrated circuits are usuallydesigned with limited performance and capability due to the spaceconstraints of the circuits. Thus, an improved integrated antennastructure is desired.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 to FIG. 7 are cross-sectional views of intermediate structuresfor a method of manufacturing a semiconductor device, in accordance withsome embodiments.

FIG. 7A is an enlarged view of the cross-sectional view of anintermediate stage of manufacturing a semiconductor device, inaccordance with some embodiments.

FIG. 8 to FIG. 10 are cross-sectional views of intermediate structuresfor a method of manufacturing a semiconductor device, in accordance withsome embodiments.

FIG. 11 is a schematic top view of the semiconductor device in FIG. 10,in accordance with some embodiments.

FIG. 12 to FIG. 18 are cross-sectional views of intermediate structuresfor a method of manufacturing a semiconductor device, in accordance withsome embodiments.

FIG. 19 is a schematic top view of the semiconductor device in FIG. 18,in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The present disclosure provides a semiconductor structure with anintegrated capacitor structure and its manufacturing method, accordingto various embodiments. As the semiconductor industry continues todevelop advanced devices, the design and manufacturing of the capacitorpresents a new challenge. That is because the capacitive performance ofa capacitor is largely determined by the area occupied by the electrodes(or conductive plates) of the capacitor. However, such constraint mustcompete with the trend of reducing the footprint for the currentadvanced semiconductor devices. In the present disclosure, a capacitorstructure is proposed in which the electrodes are formed in parallelalong a horizontal direction with an insulating film disposedtherebetween. In addition, one or more conductive vias are formed alongvertical direction to conductively couple to the electrodes. Theelectrodes may extend beyond the conductive vias to gain a greaterelectrode area. The conductive vias may extend through the electrodes.Moreover, the electrodes and the conductive vias are formed such thatthe contact area between the electrodes and the conductive vias isincreased. The capacitive performance of the capacitor structure may bemaintained or enhanced while the contact resistance is reduced.

An improved manufacturing method for forming the proposed capacitorstructure is also discussed. Through appropriate patterning schemes forforming the electrodes, the multiple different vias of the capacitorstructure may be formed by a single etching operation. Multiple etchingoperations for forming different vias may be avoided. In addition, theremaining portion of the capacitor structure and the device can beprotected from damage by limiting etching operations to the singleetching operation. As a result, the manufacturing cost and time arereduced accordingly.

FIG. 1 to FIG. 5 are cross-sectional views of intermediate structuresfor a method of manufacturing a semiconductor device 100, in accordancewith some embodiments. Referring to FIG. 1, a substrate 102 is receivedor provided. The substrate 102 (also referred to as a die substrate)includes a semiconductor material, such as silicon. In one embodiment,the substrate 102 may include other semiconductor materials, such assilicon germanium, silicon carbide, gallium arsenide, or the like. Thesubstrate 102 may be a p-type semiconductive substrate (acceptor type)or an n-type semiconductive substrate (donor type). Alternatively, thesubstrate 102 may include another elementary semiconductor, such asgermanium; a compound semiconductor including silicon carbide, galliumarsenic, gallium phosphide, indium phosphide, indium arsenide, or indiumantimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs,AlGaAs, GaInAs, GaInP, or GaInAsP; or combinations thereof. In anotheralternative, the substrate 102 may be a semiconductor-on-insulator(SOI). In still other alternatives, the substrate 102 may include adoped epitaxial layer, a gradient semiconductor layer, or asemiconductor layer overlaying another semiconductor layer of adifferent type, such as a silicon layer on a silicon germanium layer.

Various electrical components may be formed on a front surface (frontside) 102A of the substrate 102. Examples of the electrical componentsinclude active devices, such as transistors and diodes, and passivedevices, such as capacitors, inductors, and resistors. The electricalcomponents may also include conductive features, such as conductivelines or conductive vias, and insulating features electricallyinsulating the conductive features. In some embodiments, the substrate102 comprises one or more connection terminals (not shown) on the frontsurface 102A that are utilized to conductively couple the electricalcomponents of the substrate 102 to external circuits or devices.

A redistribution layer (RDL) 104 is formed over the substrate 102. TheRDL 104 is configured to electrically connect its overlying components.In addition, the RDL 104 is configured to electrically couple itsoverlying components with the electrical components of the substrate102. The RDL 104 may include multiple metal layers (e.g., a single layer107 or a portion 106 taken as a collection of metal layers of the RDL104). Each of the metal layers may include conductive wires or lines andis electrically coupled to an adjacent overlaying or underlying metallayer through metal vias. For example, several spaced metal lines 105are disposed in the portion 106 and are interconnected throughcorresponding metal vias 103. Moreover, the metal lines 105 and metalvias 103 are electrically insulated from other components. Theinsulation may be achieved by insulating materials, such as aninter-metal dielectric (IMD). The forming of the RDL 104 is elaboratedin the following description with the sublayer 107 as an example.

When the portion 106 is completed, an IMD 114 is deposited on theunderlying portion 106. The dielectric material of the IMD 114 may beformed of oxides, such as un-doped silicate glass (USG), fluorinatedsilicate glass (FSG), low-k dielectric materials, or the like. The low-kdielectric materials may have dielectric constants (i.e., k values)lower than 3.8, although the dielectric materials of the IMD 114 may beclose to 3.8. In some embodiments, the k values of the low-k dielectricmaterials are lower than about 3.0, and may be lower than about 2.5. Inaccordance with some embodiments, the dielectric layer comprises apolymer material. In an embodiment, the IMD may be formed with a varietyof dielectric materials including, for example, oxide (e.g., Ge oxide),nitride, oxynitride (e.g., GaP oxynitride), silicon dioxide (SiO₂), anitrogen-bearing oxide (e.g., nitrogen-bearing SiO₂), a nitrogen-dopedoxide (e.g., N₂-implanted SiO₂), silicon oxynitride (Si_(x)O_(y)N_(z)),a polymer material, or the like. The IMD 114 may be formed by initiallyforming a blanket dielectric material through a suitable process, suchas chemical vapor deposition (CVD), physical vapor deposition (PVD),atomic layer deposition (ALD), spin-on coating, or the like. Next, aphotoresist (not separately shown) is formed over the blanket material.Patterning operations, such as lithographic and etching methods, areperformed on the photoresist layer to form recesses.

Subsequently, a conductive material is deposited into the recesses toform conductive lines 112A, 112B and 112C. Materials of the conductivelines 112A, 112B and 1120 include, for example, titanium, tantalum,titanium nitride, tantalum nitride, copper, copper alloys, nickel, tin,gold, and combinations thereof. In some embodiments, the conductivelines 112A, 112B and 112C comprise a layered structure with differentconductive sublayers. For example, seed layers (or glue layers) 108A,108B or 108C are initially formed on the bottoms and sidewalls of therespective recesses prior to the deposition of the conductive material112A, 112B and 112C. The seed layers 108A, 108B and 108C may be formedby a conductive material, such as titanium, titanium nitride or thelike. The conductive lines 112A, 112B, 112C or the seed layers 108A,108B and 108C may be formed using the CVD, PVD, ALD, electroplating,sputtering, or the like.

In an embodiment, the RDL 104 may include more layers over the layer107. In most circuit designs, a layer in a lower portion of the RDL 104that is closer to the substrate 102 (such as the portion 106) may have agreater line density than another layer in a higher portion of the RDL104 (such as layers over the layer 107). When incorporated into the RDL104, a capacitor structure may be formed in a higher portion of the RDL104 such that a larger space between conductive lines can be allocated.FIG. 2 to FIG. 10 illustrate the formation of a capacitor structure inthe RDL 104 above the layer 107.

Referring to FIG. 2, a first protection layer 116 and a secondprotection layer 118 are formed over the layer 107. In some embodiments,the first protection layer 116 and the second protection layer 118 maybe formed with a variety of dielectric materials and may, for example,be oxide (e.g., Ge oxide), nitride, oxynitride (e.g., GaP oxynitride),silicon dioxide (SiO₂), a nitrogen-bearing oxide (e.g., nitrogen-bearingSiO₂), a nitrogen-doped oxide (e.g., N₂-implanted SiO₂), siliconoxynitride (Si_(x)O_(y)N_(z)), a polymer material, or the like. In analternative embodiment, the first protection layer 116 and the secondprotection layer 118 include a polymeric material such as polyimide(PI), polybenzoxazole (PBO), benzocyclobuten (BCB), epoxy, or the like.In the depicted example, the first protection layer 116 is formed ofsilicon nitride, and the second protection layer 118 is formed of USG.The first protection layer 116 and the second protection layer 118 maybe formed using a CVD, PVD, spin-on coating, or other suitableoperation. In an embodiment, the first protection layer 116 has athickness between 700 Angstrom and 800 Angstrom, far example 750Angstrom. In an embodiment, the second protection layer 118 has athickness between 1000 Angstrom and 5000 Angstrom, for example 3000Angstrom.

Next, a patterned first conductive layer 122 is formed over the secondprotection layer 118, as illustrated in FIG. 3. In an embodiment, thefirst conductive layer 122 serves as an electrode or conductive plate(such as conductive layers 122 and 132, which are discussed below) of acapacitor structure. In some embodiments, the first conductive layer 122has a shape like a plate, a sheet, or a strip. The first conductivelayer 122 may be comprised of copper, silver, aluminum, gold, tungsten,titanium, titanium nitride, tantalum, tantalum nitride or combinationsthereof. The first conductive layer 122 may be formed by initiallydepositing a conductive material over the second protection layer 118. Apatterning operation is performed to shape the first conductive layer122. During the patterning operation, a recess 123 is formed whichexposes a portion of the second protection layer 118 corresponding tothe conductive line 112A. In some embodiments, the thickness of thefirst conductive layer 122 is between about 200 Angstrom and about 500Angstrom, for example 400 Angstrom. In some embodiments, the sidewall ofthe first conductive layer 132 at the recess 123 (indicated by thecircle 109) may be formed as a right angle or have a slope.

FIG. 4 shows the formation of a first insulating film 124. The firstinsulating film 124 serves as an electrical insulating material betweena pair of electrodes of a capacitor structure. Generally, a greaterdielectric constant of the first insulating film 124 corresponds to lessthickness required of the first insulating film 124. In someembodiments, the thickness of the first insulating film 124 is betweenabout 30 Angstrom and about 100 Angstrom, for example 60 Angstrom. In anembodiment, the first insulating film 124 covers the second protectionlayer 118 and the conductive layer 112. In an embodiment, the firstinsulating film 124 covers sidewalls of the first conductive layer 122.The first insulating film 124 may be also lined in the recess 123.

The first insulating film 124 may be formed of a dielectric material,such as silicon oxide, silicon nitride, silicon oxynitride, metaloxides, metal nitride, metal silicates, transition metal oxide,transition metal nitride, transition metal silicates oxynitrides ofmetal, metal aluminate, zirconium silicate, zirconium aluminate, or thelike. In some embodiments, the first insulating film 124 may be formedof a high-k dielectric material. In some embodiments, the firstinsulating film 124 may be formed of Al₂O₃, HfO₂, ZrO₂, HfO_(x)N_(y),ZrO_(x)N_(y), HfSi_(x)O_(y), ZrSi_(x)O_(y), HfSi_(x)O_(y)N_(z),ZrSi_(x)O_(y)N_(z), TiO₂, Ta₂O₅, La₂O₃, CeO₂, Bi₄Si₂O₁₂, WO₃, Y₂O₃,LaAlO₃, Ba_(1-x)Sr_(x)TiO₃, PbTiO₃, BaTiO₃ (BTO), SrTiO₃ (STO), BaSrTiO₃(BST), PbZrO₃, lead-strontium-titanate (PST), lead-zinc-niobate (PZN),lead-zirconate-titanate (PZT), lead-magnesium-niobium (PMN),yttria-stabilized zirconia (YSZ), ZnO/Ag/ZnO (ZAZ), a combinationthereof, or the like. In the present embodiment, the first insulatingfilm 124 includes ZAZ, which possesses a dielectric constant greaterthan a dielectric constant of the IMD 114, the first protection layer116 or the second protection layer 118. The first insulating film 124may be formed using CVD, PVD, ALD, or other suitable depositionoperations.

Next, a patterned second conductive layer 132 is formed over the firstinsulating film 124 and the first conductive layer 122, as illustratedin FIG. 5. In an embodiment, the second conductive layer 132 serves asecond electrode or conductive plate of the capacitor structure. In someembodiments, the second conductive layer 132 has a shape like a plate, asheet, or a strip. The second conductive layer 132 may be comprised ofcopper, silver, aluminum, gold, tungsten, titanium, titanium nitride,tantalum, tantalum nitride or combinations thereof. In some embodiments,the thickness of the second conductive layer 132 is between about 200Angstrom and about 500 Angstrom, for example 400 Angstrom. The formingmethod of the second conductive layer 132 may be similar to that of thefirst conductive layer 122. During a patterning operation of the secondconductive layer 132, a recess 133 is formed which exposes a portion ofthe first insulating film 124 corresponding to the conductive line 112B.In some embodiments, a portion of the first insulating film 124 isexposed through the patterned second conductive layer 132, for example,at locations around the recesses 123 and 133. In some embodiments, thesecond conductive layer 132 covers the first conductive layer 122 in aconformal manner while exposing a portion of the first insulating film124 through the recess 133. When viewed from a cross-sectionalperspective, the second conductive layer 132 extends from a first endportion over the first conductive layer 122 towards a second end portionadjacent to the conductive line 1120. A step/corner 101 is formed in thesecond conductive layer 132. The corner 101 may have a substantiallyright angle or a slope.

Subsequent to the operation shown in FIG. 5, a second insulating film134 is formed as demonstrated in FIG. 6. The second insulating film 134serves as an electrical insulating material between another pair ofelectrodes (such as conductive layers 132 and 134 which are discussedbelow) of the capacitor structure in the present disclosure. Themanufacturing method and materials of the second insulating film 134 maybe similar to those of the first insulating film 124. In someembodiments, the thickness of the second insulating film 134 is betweenabout 30 Angstrom and about 100 Angstrom, for example 60 Angstrom. In anembodiment, the second insulating film 134 covers the conductive layers122 and 132, and the first insulating film 124. In an embodiment, thesecond insulating film 134 covers sidewalls of the second conductivelayer 132. In some embodiments, the second insulating film 134 covers atleast a portion of the sidewall of the first conductive layer 122 at therecess 123. If the insulating films 124 and 134 have substantially equaldeposition thicknesses, the thickness of the insulating material at thebottom of the recess 123 or 133 is doubled after the second insulatingfilm 134 is formed over the first insulating film 124.

Next, a patterned third conductive layer 142 is formed over the secondinsulating film 134 and the second conductive layer 132, as illustratedin FIG. 7. In an embodiment, the third conductive layer 142 serves asyet another electrode of the capacitor structure. In an embodiment, thethird conductive layer 142 may be conductively coupled to the firstconductive layer 122 such that both conductive layers effectively serveas a single electrode of the capacitor structure. In some embodiments,the third conductive layer 142 has a shape like a plate, a sheet, or astrip. The third conductive layer 142 may be comprised of copper,silver, aluminum, gold, tungsten, titanium, titanium nitride, tantalum,tantalum nitride or combinations thereof. In some embodiments, thethickness of the third conductive layer 142 is between about 200Angstrom and about 500 Angstrom, for example 400 Angstrom.

The forming method of the third conductive layer 142 may be similar tothe forming method of the conductive layer 122 or 132. During apatterning operation of the third conductive layer 142, a recess 143 isformed which exposes a portion of the second insulating film 134overlaying the recess 123. In some embodiments, the recess 143 has agreater area from a top view than the area of the recess 123. In someembodiments, the recess 143 has a greater width from a cross-sectionalview than the width of the recess 123. In some embodiments, a portion ofthe second insulating film 134 is exposed through the patterned thirdconductive layer 142, for example, at locations over the conductivelines 112B and 112C. In some embodiments, the first conductive layer 122has an end portion extending beyond an end portion of the thirdconductive layer 142 at the recess 143. A portion of the secondinsulating film 134 that covers the first conductive layer 122 isexposed through the third conductive layer 142 and serves as a portionof the bottom of the recess 143. In some embodiments, the thirdconductive layer 142 partially covers the second conductive layer 132 ina conformal manner and extends from a first end portion directly overthe second conductive layer 132 towards a second end portion over theconductive line 112A. A step/corner 201 is formed in the thirdconductive layer 142. The corner 201 may have a substantially rightangle or a slope.

FIG. 7A is an enlarged view of the cross-sectional view of the corner109 in FIG. 7 during an intermediate stage of forming the thirdconductive layer 142, in accordance with some embodiments. FIG. 7Aillustrates a manufacturing stage in which the third conductive layer142 is formed over the first insulating film 124 and the secondinsulating film 134 through a blanket deposition while not beingpatterned. Since the first conductive layer 122 has an angled sidewall122S facing the recess 123, the deposited third conductive layer 142follows the sloped configuration at portions above the sidewall 122S.Through the patterning operation, portions of the third conductive layer142 around the recess 123 are removed, thereby forming the patternedthird conductive layer 142 shown in FIG. 7. The deposition thickness ofthe third conductive layer 142 over the sidewall 122S is closely relatedto the angle of the slope at the sidewall 122S. Without a sufficientangle of the sidewall 122S (e.g., the sidewall 122S may exhibit asubstantially right angle), a thickness H1 of the third conductive layer142 right above the sidewall 122S of the first conductive layer 122 maybe much greater than the thickness H2 formed at a horizontal portion.When an etching operation is employed to pattern the third conductivelayer 142, a thickness of the third conductive layer 142 is removed fromthe portions around the recess 123. In an embodiment, a dry etch is usedfor performing the patterning operation. As a result, since thickness H1is made close to thickness H2 due to the angled sidewall 122S, a uniformremoval of the conductive materials can be achieved across thicknessesH1 and H2 through the etching operation. There would be few orsubstantially free of residues of conductive materials of the thirdconductive layer 142 remaining on the angled sidewall right above thesidewall 122S. A better profile control of the third conductive layer142 can be obtained. In an embodiment, the second conductive layer 132has an angled sidewall around the recess 133 (not separately shown) in aconfiguration similar to the sidewall 122S.

Referring to FIG. 8, subsequent to the operation in FIG. 7, an IMD 130is deposited over the second insulating film 134 and the thirdconductive layer 142. The IMD 130 may comprise a dielectric materialsuch as oxide, nitride, oxynitride, silicon dioxide, nitrogen-bearingoxide, nitrogen-doped oxide, silicon oxynitride (Si_(x)O_(y)N_(z)),polymer, or the like. In an embodiment, the IMD 130 has a thicknessbetween about 5000 Angstrom and 6000 Angstrom, for example 5500Angstrom. The material and manufacturing method of the IMD 130 may besimilar to those of the IMD 114. In an embodiment, a planarizationoperation, such as grinding or chemical mechanical planarization (CMP)operation may be employed to planarize the IMD 130 and remove excessmaterial of the IMD 130.

Subsequently, a mask layer 138 is formed over the IMD 130. The masklayer may be formed of a photoresist material or a dielectric material,such as nitride. A masking material is initially deposited over the IMD130. Next, a patterning operation is performed on the masking materialto form the mask layer 138 with openings that define the geometries ofconductive vias that are to be formed in the IMD 130. In someembodiments, the openings correspond to the conductive lines 112A, 112Band 112C.

FIG. 9 shows a formation of vias 136A, 136B and 136C in the IMD 130. Thevias 136A, 136B and 136C may be formed by an etching operation, such asa dry etch, a wet etch or a combination thereof. In the presentembodiment, the vias 136A, 136B and 136C are formed during a single dryetching operation. In some embodiments, the mask layer 138 is removed oretched after the vias 136A, 136B and 136C are completed. The vias 136A,136B and 136C extend through the IMD 130, the insulating films 124 and134, and the protection layers 116 and 118. The vias 136A, 136B and 136Cexpose upper surfaces of the respective conductive lines 112A, 112B and112C.

The via 136A extends through the recesses 143 and 123. In someembodiments, the via 136A has a stepped shape. In some embodiments, thevia 136A has progressively contracting steps starting from its upper endtowards its bottom end contacting the conductive line 112A. For example,a width W11 of the via 136A at the level of IMD 130 is greater than awidth W12 of the via 136A at the recess 143 at the level of the thirdconductive layer 142. As a result, a portion of an upper surface 142A ofthe third conductive layer 142 is exposed. In an embodiment, the uppersurface 142A has an exposed width W11-W12 of between about 100 Angstromand about 400 Angstrom from a cross-sectional view. Moreover, the widthW12 of the via 136A at the level of the recess 143 is greater than awidth W13 of the via 136A at the level of the recess 123, i.e., at thelevel of the first conductive layer 122. As a result, a portion of anupper surface 122A of the first conductive layer 122 is exposed. In anembodiment, the upper surface 122A has an exposed width W12-W13 ofbetween about 100 Angstrom and about 400 Angstrom from a cross-sectionalview.

Similarly, the via 136B extends through the recesses 133. In someembodiments, the via 136B has a stepped shape. In some embodiments, thevia 136B has progressively contracting steps starting from its upper endtowards its bottom end contacting the conductive line 112B. For example,a width W21 of the via 136B at the level of the IMD 130 is greater thana width W22 of the via 136B at the level of the recess 133, i.e., at thelevel of the second conductive layer 132. As a result, a portion of anupper surface 132A of the second conductive layer 132 is exposed. In anembodiment, the upper surface 132A has an exposed width W21-W22 ofbetween about 100 Angstrom and about 400 Angstrom from a cross-sectionalview.

The via 136C is formed to contact the conductive line 112C. In someembodiments, the via 136C serves as a conductive via of the RDL 104 anddoes not contact any of the conductive layers 122, 132 and 142 of thecapacitor structure. The via 136C may not possess a shape other than astepped shape like the vias 136A and 136B.

In some embodiments, some of the conductive layers 122, 132 and 142 mayhave a sloped sidewall such that the etching operation may completelyremove the insulating materials on the sidewalls. In alternativeembodiments, some insulating material remains on the sidewalls of theconductive layers 122, 132 and 142. As an exemplary configuration, thevia 136A exposes sidewalls of the third conductive layer 142 from across-sectional view at the recess 143. Similarly, the via 136B exposessidewalls of the second conductive layer 132 from a cross-sectional viewat the recess 133. In some embodiments, a portion of the firstinsulating film 124 remains to cover the sidewalls of the firstconductive layer 122 at the recess 123.

Referring to FIG. 8 and FIG. 9, the vias 136A, 136B and 136C extendthrough different numbers of conductive layers (e.g., the via 136Aextends through conductive layers 122 and 142, while the via 136Bextends through the second conductive layer 132 and the via 136C doesnot extend through any of the conductive layers). However, the formedrecesses 123, 133 and 143 allow the etching operation to etch throughsubstantially a same combination of dielectric layers, i.e., the firstprotection layer 116, the second protection layer 118, the insulatingfilms 124 and 134, and the IMD 130. No conductive layers are taken intoconsideration during the etching operation, and thus the adopted etchrecipes and attained etch performances for the different vias 136A, 136Band 136C are similar. As a result, a single etching operation, such as adry etch, is sufficient for the three different vias 136A, 136B and136C, which provides a saving of the manufacturing cost and time.

FIG. 10 illustrates a formation of the conductive structures 144A, 144Band 144C in the vias 136A, 136B and 136C, respectively. The conductivestructures 144A, 144B and 144C can be seen as conductive vias. Materialsof the conductive structures 144A, 144B and 144C include, for example,titanium, tantalum, titanium nitride, tantalum nitride, copper, copperalloys, nickel, tin, gold, and combinations thereof. In someembodiments, the conductive structures 144A, 144B and 144C comprise alayered structure with different conductive sublayers. For example, seedlayers (or glue layers) 146A, 146B and 146C, are initially lined on thebottoms and sidewalls of the respective recesses prior to the depositionof the conductive filling material 154A, 154B and 154C. The seed layers146A, 146B and 146C may be formed by a conductive material, such astitanium, titanium nitride or the like. The conductive filling materials154A, 154B and 154C or the seed layers 146A, 146B and 146C may be formedusing CVD, PVD, ALD, electroplating, sputtering, or the like. The firstconductive layer 122 and the third conductive layer 142 are conductivelycoupled to each other through the conductive structure 144A andelectrically insulated from the second conductive layer 132; thus theycan be regarded as a joint electrode of the capacitor structure. Thesecond conductive layer 132 is conductively coupled to the conductivestructure 144B and is regarded as another electrode of the capacitorstructure.

The conductive structure 144C is conductively coupled to the conductiveline 112C. The conductive route comprised of the conductive structure144C and conductive line 112C may be used for a logic device other thanthe capacitor structure. In an embodiment, the conductive structure 144Cis formed during an operation that includes forming the conductivestructures 144A and 144B.

Referring to FIG. 10, the conductive structure 144A, 144B or 144Cexhibits a stepped shape that is conformal to sidewalls of theconductive layers 122, 132 and 142 from a cross-sectional view. In anembodiment, the conductive structure 144A, 144B or 144C has a steppedshape following the stepped configuration formed of the conductivelayers 122, 132, and 142 and insulating films 134 and 144. The steppedshape of the conductive structure 144A enables the third conductivelayer 142 to contact the conductive structure 144A through a planarsurface (e.g., the upper surface 142A) in addition to the sidewall ofthe third conductive layer 142. A greater contact area is achieved andthe contact resistance is reduced. Similarly, the first conductive layer122 conductively couples to the conductive structure 144A through aplanar surface, e.g., the upper surface 122A. Since the contact area ofthe upper surface 122A is significantly greater than that of thesidewall of the first conductive layer 122, the adverse impact of thefirst insulating film 124 covering the sidewall of the first conductivelayer 122 can be minimized. Moreover, the stepped shape of theconductive structure 144B enables the second conductive layer 132 tocontact the conductive structure 144B through a planar surface (e.g.,the upper surface 132A) in addition to the sidewall of the secondconductive layer 132.

In the present embodiment, the conductive structure 144A runs throughthe first conductive layer 122 and the third conductive layer 142 toconductively couple them with the underlying conductive line 112A. Inother words, the third conductive layer 142 is conductively coupled tothe remaining circuits of RDL 104 through the conductive line 112A. Suchconfiguration is useful when the capacitor electrode (e.g., thirdconductive layer 142) is formed at a higher portion of the RDL 104 inorder to have a greater electrode area among the sparsely deployedinterconnected circuits. However, since the interconnected circuitsabove the conductive layer 142 are sparsely configured, it may not beefficient to provide electrical connections for the third conductivelayer 142 through portions thereabove. Consequently, a run-throughconfiguration of the conductive structure 144A may enhance theelectrical performance of the capacitor electrode.

The conductive structures 144A, 144B and 144C include horizontalportions 145A, 145B and 145C, respectively, extending over the IMD 130.The horizontal portions 145A, 145B and 145C may have a circular shape ora polygonal shape from a top view. In some embodiment, the horizontalportions 145A, 145B and 145C serve as contact pads or input/output padsof the semiconductor device 100 for conductively coupling with otherdevices. In an embodiment, the horizontal portions 145A, 145B and 145Care in a topmost layer of the semiconductor device 100.

FIG. 11 is a schematic top view of the semiconductor device 100 in FIG.10, in accordance with some embodiments. FIG. 11 merely illustrates topviews of some features in FIG. 10, such as the conductive layers 122,132 and 142, and the conductive structures 144A and 144B, for simplicityand clarity. The second conductive layer 132 partially overlaps theconductive layers 122 and 142. The conductive structure 144A or 144B hasa stepped shape, and each step in FIG. 10 is illustrated with differentline types along with its dimensions. As mentioned previously, thestepped configurations of the conductive structures 144A and 144B enablethe contact of the conductive structure 144A or 144B with thecorresponding conductive layers 142, 122 and 132 from their uppersurfaces 142A, 122A and 132A. Each step may have different shapes from atop view, such as a circular shape, a rectangular shape, or a polygonalshape. The area of the via 136A at the level of IMD 130 (correspondingto the width W11) is greater than the area of the via 136A at the recess143 at the level of the third conductive layer 142 (corresponding to thewidth W12). Similarly, the area of the via 136A at the level of thethird conductive layer is greater than the area of the via 136A at therecess 123 or the first conductive layer 122 (corresponding to the widthW13). In addition, the area of the via 136B at the level of IMD 130(corresponding to the width W21) is greater than the area of the via136B at the recess 133 or the level of the second conductive layer 132(corresponding to the width W22).

FIG. 11 also demonstrates an additional conductive structure 144D, whichis formed to conductively couple to the conductive layers 142 and 122 ina manner similar to that of the conductive structure 144A. A via may beformed adjacent to the via 136A during the formation of the via 136A,followed by deposition of a conductive material into such via to formthe conductive structure 144D. In addition, a conductive structure 144Eis formed to conductively couple to the second conductive layer 132 in amanner similar to that of the conductive structure 144B. In anembodiment, the conductive structures 144A and 144D are conductivelycoupled via a conductive line or strip to form a merged conductivestructure. The proposed multiple conductive via configurations may allowfor a greater capacitor electrode area extending in a horizontaldirection to accommodate additional conductive structures. Moreover,through disposition of additional conductive vias e.g., conductivestructure 144D or 144E) that conductively couple to the conductivelayers, an effective contact resistance between the capacitor structureand the semiconductor device 100 is further reduced.

FIG. 12 to FIG. 18 are cross-sectional views of intermediate structuresfor a method of manufacturing a semiconductor device 200, in accordancewith some embodiments. Some aspects of forming the semiconductor device200 are similar to those of forming the semiconductor device 100, andthus are not repeated herein for simplicity and clarity. Like referencenumerals used across different figures indicate similar materials,configurations and features of the reference numerals among differentfigures. Referring to FIG. 12, the substrate 102 and the portion 106 ofthe RDL 104 are formed in succession. Next, the layer 107 and theprotection layers 116 and 118 are sequentially formed over the portion106. In addition to the conductive lines 112A through 112C, the layer107 includes a conductive line 112D. The material and forming method ofthe conductive line 112D are similar to those of the conductive line112A.

Still referring to FIG. 12, conductive layers 222, 232 and 242 andinsulating films 224, 234 and 244 are formed alternately over the secondprotection layer 118. The conductive layers 222, 232 and 242 serve ascapacitor electrodes and correspond to the conductive layers 122, 132and 142, respectively, in the semiconductor device 100. The formingmethods, geometries and materials of the conductive layers 222, 232 and242 may be similar to those of the conductive layers 122, 132 and 142.However, no patterning operations are performed immediately followingthe blanket layer formation of the layers 222 and 232. The insulatingfilms 224 and 234 serve as insulating materials electrically insulatingthe capacitor electrodes, and correspond to the insulating films 124 and134 in the semiconductor device 100. The forming methods, geometries andmaterials of the insulating films 224, 234 and 244 may be similar tothose of the insulating films 124 and 134. However, no patterningoperations are performed immediately following the film formation. Insome embodiments, the insulating film 244 may be formed of a dielectricmaterial different from the insulating films 224 and 234, such assilicon oxide, silicon nitride, silicon oxynitride, or the like. In thepresent embodiment, the insulating film is formed of silicon nitride.

FIG. 13 through FIG. 16 illustrate patterning operations of theconductive layers 222, 232, and 242 and the insulating films 224, 234and 244. Initially, a mask layer 282 is deposited over the insulatingfilm 244, as illustrated in FIG. 13. The mask layer 282 may include aphotoresist material. Alternatively, the mask layer 282 may include adielectric material, such as oxide, nitride, oxynitride, or the like.The mask layer 282 may be, for example, spun on the surface of theinsulating film 244, followed by a patterning operation. Accordingly,vias 236A, 236B, 236C and 236D are formed in the patterned mask layer282. In an embodiment, the vias 236A through 236D may have a circularshape from a top view. In some embodiments, the vias 236A through 236Dmay have a polygonal shape from a top view, such as a rectangle. Next,an etching operation is performed to remove portions of the insulatingfilm 244 and the conductive layer 242 with the mask layer 282 as mask.The etching operation may include a dry etch, a wet etch or acombination thereof. In some embodiments, the etch illustrated in FIG.13 removes the insulating film 244 and the conductive layer 242. As aresult, the vias 236A through 236D extend downwardly and portions of theupper surface 234A of the insulating film 234 are exposed, for example,the upper surfaces 234A in the vias 236A and 236C. Since the etchremoves similar layers (i.e., the insulating film 244 and conductivelayer 242) in forming different vias 236A through 236D, the variablefactors of the etch operation can be easily managed such that theundesired over-etch or under-etch effect in different materials may beminimized. In some embodiments, when the etch operation is completed,the mask layer 282 may be removed.

FIG. 14 shows a patterning operation of the insulating films 234 and 244and the conductive layers 232 and 242. A mask layer 284 is depositedover the insulating film 244. The mask layer 284 may include a materialsimilar to that of the mask layer 282. The mask layer 284 may be, forexample, spun on the surface of the insulating film 244, followed by apatterning operation. The mask layer 284 covers portions of theinsulating film 244 in the via 236A while keeping the vias 236B, 236Cand 236D opened. Further, a new via 236E is formed between the vias 236Band 236C. In some embodiments, the via width of the via 236B, 236C or236D in the mask layer 284 is less than its corresponding via width inthe mask layer 282. Next, an etching operation is performed to removeportions of the insulating film 234 and the conductive layer 232 withthe mask layer 284 as mask. The etching operation may include a dryetch, a wet etch or a combination thereof. The etch illustrated in FIG.14 removes the insulating film 234 and the conductive layer 232 from thevias 236B, 236C and 236D. Accordingly, portions of the upper surface224A of the insulating film 224 are exposed through the vias 236B, 236Cand 236D. Similarly, the etch removes the insulating film 244 and theconductive layer 242 from the via 236E. Thus, a portion of the uppersurface 234A of the insulating film 234A is exposed through the via236E. A stepped shape, e.g., a two-step shape, for the vias 236B, 236C,236D and 236E is obtained. In some embodiments, when the etchingoperation in FIG. 14 is completed, the mask layer 284 may be removed.

FIG. 15 shows a patterning operation of the insulating films 224 and 234and the conductive layers 222 and 232. A mask layer 286 is depositedover the insulating film 244. The mask layer 286 may include a materialsimilar to that of the mask layer 282 or 284. The mask layer 286 may be,for example, spun on the surface of the insulating film 244, followed bya patterning operation. The mask layer 286 covers the via 236A whilekeeping vias 236B, 236C, 236D and 236E open. In some embodiments, thevia width of each of the vias 236B through 236E in the mask layer 286 isless than its corresponding via width in the mask layer 284. Next, anetching operation is performed to remove portions of the insulating film224 and the conductive layer 222 with the mask layer 286 as mask. Theetching operation may include a dry etch, a wet etch or a combinationthereof. The etch illustrated in FIG. 15 removes the insulating film 224and the conductive layer 222 from the vias 236B, 236C and 236D.Accordingly, portions of the upper surface 118A of the second protectionlayer 118 are exposed through the vias 236B, 236C and 236D. Similarly,the etch removes the insulating film 234 and the conductive layer 232from the via 236E. Thus, a portion of the upper surface 224A of theinsulating film 224A is exposed through the via 236E. A stepped shape,e.g., a three-step shape, for the vias 236B through 236E is obtained. Insome embodiments, when the etching operation in FIG. 15 is completed,the mask layer 286 may be removed.

In some embodiments, the etch operations shown in FIGS. 14 and 15 may bemerged. The etch may remove the insulating film 234, the conductivelayer 232, the insulating film 224 and the conductive layer 222 using asingle mask layer for forming the vias 236B through 236D. Similarly, theetch may remove the insulating film 244, the conductive layer 242, theinsulating film 234 and the conductive layer 232 using a single masklayer for forming the via 236E. As a result, the vias 236B, 236C, 236Dand 236E may exhibit a stepped shape, i.e., a two-step shape, differentfrom that shown in FIG. 15. Since the combination of the layers to beetched for forming such two-step vias are similar for different vias,the variables of the etch operation can be easily managed such that thebenefit of minimizing over-etch or under-etch effects can still berealized.

In the embodiment in which the etch operations in FIGS. 14 and 15 aremerged, a total of only two etching steps is required for forming thevias 236A through 236E of the semiconductor device 200. In contrast,referring to FIGS. 3 to 7, the formation of each of the conductivelayers 122, 132 and 142 of the semiconductor device 100 requires arespective patterning operation. The manufacturing operations of thesemiconductor device 200 are thus beneficial in that one fewer etchingstep is needed. The processing cost and time, and the likelihood ofparticle contamination during the etching and accompanying surfacecleaning operations, can be further reduced. In addition, theabovementioned processing advantage of the semiconductor device 200 ismore pronounced in configurations having a greater number of theconductive layers. For example, in a six-layer configuration, formingconductive vias through the conductive layers of the semiconductordevices 100 and 200 may require six and three patterning operations,respectively.

Referring to FIG. 16, an etching operation is performed on theconductive layers 222, 232, and 242. In some embodiments, the etch is adry etch, a wet etch, or combinations thereof. In an embodiment, anisotropic etch is utilized to laterally encroach sidewalls of the vias236A through 236F. In an embodiment, the etching operation may employ anetching gas, such as Cl₂ or the like. During the etching operation, theinsulating films 224, 234 and 244 are kept substantially unetched. In anembodiment, the etch ratio of the conductive layers to the insulatingfilms is between about 2.0 and about 20.0. The etched sidewalls of theconductive layers 222, 232 and 242 around the vias 236A through 236E mayinclude a curved shape.

In some embodiments, an inactivation treatment is performed on theetched sidewalls of the conductive layers 222, 232 and 242. In anembodiment, a reacting gas, such as N₂O, is used for oxidizing athickness of the conductive layer 222, 232 or 242 at its sidewalk.Accordingly, oxide films, for example titanium oxide films, labeled inFIG. 16 as 222B, 232B or 242B, are formed covering un-oxidized sidewallsof the conductive layers 222, 232 and 242 in the vias 236A through 236F.Such oxide films aid in preventing unintentional short circuit orleakage current between the conductive layers 222, 232 and 242 andneighboring features.

Referring to FIG. 17, an IMD 230 is formed over the insulating film 244.The IMD 230 may cover the insulating film 244 and fills the vias 236Athrough 236F. The material and forming method of the IMD 230 may besimilar to those of the IMD 130. Subsequently, an etching operation isperformed to form vias 238A through 238E in the IMD 230 that correspondto the locations of the vias 236A through 236E, respectively. Moreover,additional vias 238F and 238G are formed around the via 238B by theetching operation. The etching operation may include a dry etch and awet etch operation. Each of the vias 238A through 238E has a via widthless than the width of the corresponding via 236A through 236E. The etchremoves the protection layers 118 and 116 such that the conductive lines112A through 112D are exposed through the vias 238D, 238B, 238F and238C, respectively. Furthermore, the etch removes the insulating films222, 232 and 242 from the vias 238E, 238A and 238G, respectively, suchthat respective upper portions (e.g., 222A, 232A and 242A) of theconductive layers 222, 232 and 242 are exposed.

Subsequently, conductive structures 250, 260 and 270 are formed in thevias 238A through 238G, as shown in FIG. 18. A conductive material isinitially deposited over the IMD 230 and in the vias 238A through 238G.The configurations and materials may be similar to the conductivestructures 144A, 144B and 144C described and illustrated with referenceto in FIG. 10. A patterning operation is performed to etch theconductive material, and thus the conductive structures 250, 260 and 270are obtained. In an embodiment, the conductive structure 250, 260 or 270may have a layered structure, for example, by including a seed layersimilar to the seed layer 146A, 146B or 146C of the semiconductor device100. The conductive structure 250 has a horizontal portion thatconductively couples the vertical portions 252 and 254. The verticalportions 252 and 254 are formed as conductive vias through the IMD 230,the first protection layer 116 or the second protection layer 118. Theconductive structure 250 conductively couples the conductive layer 232with the conductive line 112A in which the conductive layer 232 isregarded as one of the capacitor electrodes. Existing schemes couple theconductive layer with the conductive via only via a sidewall of theconductive layer. Since the conductive via 252 contacts the conductivelayer 232 from an upper surface of the conductive layer 232, a greatercontact area can be obtained that reduces the contact resistance of thecapacitor structure.

The conductive structure 260 includes a horizontal portion 261 over theIMD 230 to conductively couple the conductive layer 222 with theconductive layer 242 through vertical portions (conductive vias) 264 and268. Through the conductive coupling, the conductive layers 222 and 242are collectively regarded as the other electrode of the capacitorstructure. In addition, the conductive structure 260 is conductivelycoupled to the conductive lines 112B and 112D through conducive vias 266and 262. Since the conductive vias 264 and 268 contact the conductivelayers 222 and 242 from an upper surface thereof, a greater contact areais obtained that reduces the contact resistance of the capacitorstructure.

The conductive structure 270 includes a horizontal portion 271 over avertical portion (conductive via) 272 that is conductively coupled tothe conductive line 112C. The conductive route comprised of theconductive via 272 and conductive line 112C may be used for a logicdevice other than the capacitor structure. In an embodiment, theconductive via 272 is formed during an operation during which theconductive structures 150 and 160 are formed.

The horizontal portions 251, 261, and 271 of the conductive structures250, 260 and 270 extend over the IMD 230. In an embodiment, thehorizontal portions 251, 261, and 271 may have a circular shape or apolygonal shape from a top view. In some embodiment, the horizontalportions 251, 261, and 271 serve as contact pads or input/output pads ofthe semiconductor device 100 for conductively coupling with otherdevices. In an embodiment, the horizontal portions 251, 261, and 271 isin a topmost layer of the semiconductor device 200.

FIG. 19 is a schematic top view of the semiconductor device 200 in FIG.18, in accordance with some embodiments. The cross-sectional view of thesemiconductor device 200 in FIG. 18 are taken along sectional line AA inFIG. 19. Each of the conductive vias 252, 254, 262, 264, 266, 268 and272 has a circular shape from a top view as an example. Each of theconductive vias may have a tapered sidewall. Some of the conductive viasmay have concentric circles representing different via widths atdifferent via levels. For example, the conductive via 254 has threeprogressively larger concentric circles denoting different via widths,labeled from bottom to top, at the conductive line 112A, the conductivelayer 222, and the conductive layer 242, respectively. In the depictedembodiment, the semiconductor device 200 further includes conductivevias 352 and 354 for the conductive structure 250, conductive vias 362,364 and 366 for the conductive structure 260, and conductive vias 368and 372 for the conductive structure 270. The additional conductive viascan help increase conductive contact area of the capacitor structurewith the RDL 104 and reduce the contact resistance further.

Referring to FIG. 10, the conductive layers 122, 132 and 142 extend intolimited areas. This is because the conductive layers 122 and 124 arepatterned so as to facilitate forming of the conductive via 144B, andthe second conductive layer 132 is patterned to facilitate forming ofthe conductive via 144A. As a result, the overlapped region between thefirst electrode (comprised of the conductive layers 122 and 142) and thesecond electrode (comprised of the second conductive layer 132) islimited as compared to the entire electrode areas of the conductivelayers 122, 132 and 142. In contrast, as shown in FIG. 18, gaps may bepresent between the conductive vias 252, 254, 262, 264, 266, 268 and 272and the corresponding conductive layers 222, 232 and 242. The gaps arefilled with the IMD 230. Such gaps may allow the conductive layers 222,232 and 242 to extend horizontally with less restriction, in otherwords, the conductive layers 222, 232 and 242 almost fully overlap oneanother except in the locations of the conductive vias 254, 262, 264,266, 268 and 272. The capacitive coupling between the first electrode(comprised of the conductive layers 222 and 242) and the secondelectrode (comprised of the second conductive layer 232) is increasedaccordingly. Therefore, a better capacitive performance of thesemiconductor device 200 can be obtained.

The present disclosure provides a semiconductor structure, whichincludes a capacitor including a first electrode and a second electrodedisposed over and electrically insulated from the first electrode. Thesemiconductor structure also includes a first conductive via extendingthrough the first electrode and contacting a planar surface of the firstelectrode. The semiconductor structure further includes a secondconductive via extending through the second electrode and contacting aplanar surface of the second electrode.

The present disclosure provides a semiconductor structure. Thesemiconductor structure includes a first conductive layer and a secondconductive layer over the first conductive layer. The first conductivelayer partially overlaps and is electrically insulated from the secondconductive layer. The semiconductor structure further includes a firstdielectric layer between the first conductive layer and the secondconductive layer and a second dielectric layer over the secondconductive layer. The first conductive layer is at least partiallyoverlapping the second conductive layer while electrically insulatedfrom the second conductive layer by the first dielectric layer. Thesemiconductor structure also includes a first conductive structurehaving a conductive via extending through the second conductive layer,the first dielectric layer, and the second dielectric layer andterminating on a planar surface of the first conductive layer.

The present disclosure provides a method of manufacturing asemiconductor structure, including: providing a substrate; forming afirst conductive layer over a substrate; depositing a first dielectriclayer over the first conductive layer; forming a second conductive layerover the first dielectric layer; forming a second dielectric layer overthe second conductive layer; forming a plurality of vias through thefirst conductive layer, the second conductive layer, the firstdielectric layer and the second dielectric layer, at least one of theplurality of vias exposing an upper surface of the first conductivelayer; and forming a conductive structure in the plurality of vias.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor structure, comprising: acapacitor comprising a first conductive plate, a second conductive plateand a third conductive plate, the second conductive plate electricallyinsulated from the first conductive plate and the third conductiveplate, and each of the first conductive plate, the second conductiveplate and the third conductive plate comprising a planar surface; afirst conductive via extending through the first conductive plate andthe third conductive plate, and contacting the planar surface of thefirst conductive plate and the planar surface of the third conductiveplate; a second conductive via extending through the second conductiveplate and contacting the planar surface of the second conductive plate;and a conductive line below the first conductive plate, wherein theconductive line comprises an upper surface, wherein the first conductivevia terminates on the upper surface of the conductive line.
 2. Thesemiconductor structure according to claim 1, further comprising adielectric layer electrically insulating the first conductive plate fromthe second conductive plate.
 3. The semiconductor structure according toclaim 1, wherein each of the first conductive via and the secondconductive via comprises a stepped shape having a top portion and abottom portion in which the top portion is wider than the bottomportion.
 4. The semiconductor structure according to claim 1, wherein atleast one of the first conductive plate and the second conductive platecomprises an angled sidewall.
 5. The semiconductor structure accordingto claim 1, further comprising an insulating film electricallyinsulating the second conductive plate from the first and the thirdconductive plates, wherein the insulating film comprises a firstportion, wherein the first portion contacts the first conductive plateand separates the first conductive via from the second conductive plate.6. The semiconductor structure according to claim 5, wherein the firstconductive plate comprises a second portion exposed through the firstportion of the insulating film, and the insulating film covers anentirety of the second conductive plate.
 7. The semiconductor structureaccording to claim 5, wherein the first conductive via and the secondconductive via extend through the insulating film.
 8. A semiconductorstructure, comprising: a semiconductor substrate; and a redistributionlayer disposed over and electrically coupled to the semiconductorsubstrate, the redistribution layer comprising: a first conductive lineand a second conductive line; and a capacitor over the first conductiveline and the second conductive line, the capacitor comprising: a firstconductive plate; a first insulating film over the first conductiveplate; a second conductive plate adjacent to the first conductive plateand electrically insulated from the first conductive plate by the firstinsulating film; a second insulating film over the second conductiveplate; a third conductive plate over the second conductive plate andelectrically insulated from the second conductive plate by the secondinsulating film, wherein each of the first conductive plate, the secondconductive plate and the third conductive plate comprises a planarsurface; a first conductive via extending through the first conductiveplate and the third conductive plate, the first conductive viaterminating on the first conductive line and contacting the planarsurface of the first conductive plate and the planar surface of thethird conductive plate; and a second conductive via extending throughthe second insulating film, the second conductive via terminating on thesecond conductive line and contacting the planar surface of the secondconductive plate.